光刻工艺是制造中非常精细一个流程,为保证曝光精度,必须要考虑如下哪些参数 ( ) ( A )特征尺寸 ( B )分辨率 ( C )套刻精度 ( D )工艺宽容度
A.
特征尺寸
B.
分辨率
C.
套刻精度
D.
工艺宽容度
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